File Name: semiconductor material and device characterization schroder .zip
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However, when assessing material quality and device reliability, it is important to have fast, nondestructive, accurate and easy-to-use electrical characterization techniques available, so that important parameters such as carrier doping density, type and mobility of carriers, interface quality, oxide trap density, semiconductor bulk defect density, contact and other parasitic resistances and oxide electrical integrity can be determined. This chapter describes some of the more widely employed and popular techniques that are used to determine these important parameters. The techniques presented in this chapter range in both complexity and test structure requirements from simple current—voltage measurements to more sophisticated low-frequency noise, charge pumping and deep-level transient spectroscopy techniques. However, it is not always the case that improvements in the quality of materials have kept pace with the evolution of integrated circuit down-scaling. An important aspect of assessing the material quality and device reliability is the development and use of fast, nondestructive and accurate electrical characterization techniques to determine important parameters such as carrier doping density, type and mobility of carriers, interface quality, oxide trap density, semiconductor bulk defect density, contact and other parasitic resistances and oxide electrical integrity. This chapter will discuss several techniques that are used to determine these important parameters.
Du kanske gillar. Ladda ned. Spara som favorit. Skickas inom vardagar. This Third Edition updates a landmark text with the latest findings The Third Edition of the internationally lauded Semiconductor Material and Device Characterization brings the text fully up-to-date with the latest developments in the field and includes new pedagogical tools to assist readers. Not only does the Third Edition set forth all the latest measurement techniques, but it also examines new interpretations and new applications of existing techniques.
The purpose of this article is to summarize the methods used to experimentally characterize a semiconductor material or device PN junction , Schottky diode , etc.
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